| Preview | Issue Date | Title | Author(s) | Preview | Type | Issue Date | Title | Author(s) |
|---|---|---|---|---|---|---|---|---|
| 2010 | Special feature of forming solid planar diffusion a source for submicron structure | Berezhansky, Volodymyr | Article | 2010 | Special feature of forming solid planar diffusion a source for submicron structure | Berezhansky, Volodymyr |