Preview | Issue Date | Title | Author(s) | Preview | Type | Issue Date | Title | Author(s) |
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2010 | Model of a piezoelectric microaccelerometer based on two piezoelectric plates separated by a layer of polysilicon | Kushnir, Yurij; Lobur, Mykhaylo | Article | 2010 | Model of a piezoelectric microaccelerometer based on two piezoelectric plates separated by a layer of polysilicon | Kushnir, Yurij; Lobur, Mykhaylo |