| Preview | Issue Date | Title | Author(s) | Preview | Type | Issue Date | Title | Author(s) |
|---|---|---|---|---|---|---|---|---|
| 2001 | Method of parameter control of dielectric layer phase thickness on Si crystal surface | Kosoboutski, P.; Lobur, М. | Article | 2001 | Method of parameter control of dielectric layer phase thickness on Si crystal surface | Kosoboutski, P.; Lobur, М. |