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Please use this identifier to cite or link to this item: https://oldena.lpnu.ua/handle/ntb/46331
Title: Синтез напівпровідникових тонких плівок цинк сульфіду і цинк селеніду. Огляд
Other Titles: Synthesis of zinc sulfide and zinc selenide semiconductor thin films. Review
Authors: Созанський, М. А.
Шаповал, П. Й.
Ятчишин, Й. Й.
Стаднік, В. Є.
Ларук, М. М.
Sozanskyi, M. A.
Shapoval, P. Yo.
Yatchyshyn, Yo. Yo.
Stadnik, V. E.
Laruk, M. M.
Affiliation: Національний університет “Львівська політехніка”
Bibliographic description (Ukraine): Синтез напівпровідникових тонких плівок цинк сульфіду і цинк селеніду. Огляд / М. А. Созанський, П. Й. Шаповал, Й. Й. Ятчишин, В. Є. Стаднік, М. М. Ларук // Chemistry, Technology and Application of Substances. — Lviv : Lviv Politechnic Publishing House, 2018. — Том 1. — № 2. — С. 1–9.
Bibliographic description (International): Synthesis of zinc sulfide and zinc selenide semiconductor thin films. Review / M. A. Sozanskyi, P. Yo. Shapoval, Yo. Yo. Yatchyshyn, V. E. Stadnik, M. M. Laruk // Chemistry, Technology and Application of Substances. — Lviv : Lviv Politechnic Publishing House, 2018. — Vol 1. — No 2. — P. 1–9.
Is part of: Chemistry, Technology and Application of Substances, 2 (1), 2018
Issue: 2
Issue Date: 26-Feb-2018
Publisher: Lviv Politechnic Publishing House
Place of the edition/event: Lviv
Lviv
Keywords: цинк сульфід
цинк селенід
напівпровідникові плівки
хімічне осадження
морфологія поверхні
zinc sulfide
zinc selenide
semiconductor films
chemical deposition
surface morphology
Number of pages: 9
Page range: 1-9
Start page: 1
End page: 9
Abstract: Проведено огляд основних фізичних і хімічних методів синтезу тонких плівок цинк сульфіду (ZnS) та цинк селеніду (ZnSe). Розглянуто кристалографічні характеристики цих сполук. Проаналізовано особливості виконання методів, їхні переваги та недоліки. Показано основні параметри отримання (температура, час осадження) плівок ZnS та ZnSe, їхні структурні, морфологічні властивості та товщину залежно від вибраного способу їхнього синтезу. Вивчено перспективи практичного використання хімічних методів. Аргументовано вибрано оптимальний метод хімічного осадження для одержання тонких плівок ZnS та ZnSe, які можна використати для заміни кадмійвмісних покриттів у буферних шарах фоточутливих елементів.
A review of the main physical and chemical methods of synthesis of zinc sulfide (ZnS) and zinc selenide (ZnSe) thin films was made. The crystallographic characteristics of these compounds are considered. The features of carrying out of methods, their advantages and disadvantages are analysed. The main parameters (temperature, deposition duration) of obtaining of ZnS and ZnSe thin films, their structural, morphological and thickness depending on the chosen method of their synthesis are shown. The possibilities of chemical methods practical use are studied. A well-reasoned choice of the optimal method of chemical deposition for obtaining of ZnS and ZnSe thin films, which can be used as a replacement of cadmiumcontaining in buffer layers of photosensitive elements, was made.
URI: https://ena.lpnu.ua/handle/ntb/46331
Copyright owner: © Національний університет „Львівська політехніка“, 2018
© Созанський М. А., Шаповал П. Й., Ятчишин Й. Й., Стаднік В. Є., Ларук М. М., 2018
References (Ukraine): 1. Andreev A.A. Synthesis and Some Properties of Single Crystals of the ZnxGd1-xS and ZnSySe1-y Solid Solutions / A.A. Andreev, M.F. Bulanyi, S.A. Golikov, L.A. Mozharovsikii // Russian Journal of Inorganic Chemistry. – 1995. – Vol. 40. – P. 1039–1042.
2. Knitter S. Der Chemische Transport von Mischkristallen in den Systemen MnS/ZnS, FeS/ZnS und FeS/MnS / S. Knitter, M. Binnewies // Zeitschrift für anorganische und allgemeine Chemie. – 1999. – Vol. 625, Iss. 9. – P. 1582–1588.
3. Block S. Round-Robin Study of the High Pressure Phase Transition in ZnS / S Block // Acta Crystallographica, Section A. – 1978. – Vol. 34. – S. 316a.
4. Smith P.L. The high-pressure structures of zinc sulphide and zinc selenide / P. L. Smith, J. E. Martin // Physics Letters. – 1965. – Vol. 19, Iss. 7. – P. 541–543.
5. Bither T. A. Transition Metal Pyrite Dichalcogenides. High-Pressure Synthesis and Correlation of Properties / T. A. Bither, R. J. Bouchard, W.H. Cloud, P.C. Donohue, W.J. Siemons // Inorganic Chemistry. – 1968. – Vol. 7. – P. 2208–2220.
6. Parasyuk O.V. Phase diagram of the Cu2GeSe3–ZnSe system and crystal structure of the Cu2ZnGeSe4 compound / O.V. Parasyuk, L.D. Gulay, Y.E. Romanyuk, L.V. Piskach // Journal of Alloys and Compounds. – 2001. – Vol. 329. P. 202–207.
7. Kulakov M.P. Phase Diagram and Crystallization In The System CdSe-ZnSe / M.P. Kulakov, I.V. Balyakina, N.N. Kolesnikov // Inorganic Materials. – 1989. – Vol. 25. – P. 1386–1389.
8. Kurbatov D. Growth kinetics and stoichiometry of ZnS films obtained by closespaced vacuum sublimation technique / D. Kurbatov, A. Opanasyuk, S. Duvanov, A. Balogh, H. Khlyap // Solid State Sciences. – 2011. – Vol. 13. – P. 1068–1071.
9. Arslana M. Structural and optical properties of copper enriched ZnSe thin films prepared by closed space sublimation technique / M. Arslana, A. Maqsood, A. Mahmoo, A. Iqba // Materials Science in Semiconductor Processing. – 2013. – Vol. 16. – P. 1797–1803.
10. Ivashchenko M.M. Influence of deposition conditions on morphological, structural, optical and electro-physical properties of ZnSe films obtained by close-spaced vacuum sublimation / M.M. Ivashchenko, I.P. Buryk, A.S. Opanasyuk, D. Nam, H. Cheong, Ja.G. Vazievb, V.V. Bibyk // Materials Science in Semiconductor Processing. – 2015. – Vol. 36. – P. 13–19.
11. Emam-Ismail M. Microstructure and optical studies of electron beam evaporated ZnSe1−xTex nanocrystalline thin films / M. Emam-Ismail, M. El-Hagary, E. Shaaban, A. Al-Hedeib. // Journal of Alloys and Compounds. – 2012. – Vol. 532. – P. 16–24.
12. Jian S. Berkovich nanoindentation-induced dislocation energetics and pop-ineffects in ZnSe thin films / S. Jian, Y. Lin // Journal of Alloys and Compounds. – 2014. – Vol. 590. – P. 153–156.
13. Lee L. Origin of localized states in zinc-blende ZnCdSe thin films and the influence on carrier relaxation of self-assembled ZnTe/ZnCdSe quantum dots / L. Lee, Y. Dai, C. Yang, W. Fan, W. Chou // Journal of Alloys and Compounds. – 2015. – Vol. 632. – P. 392–396.
14. Zhang W. Phase controlled synthesis and optical properties of ZnS thin films by pulsed laser deposition / W. Zhang, X. Zeng, J. Lu, H. Chen. // Materials Research Bulletin. – 2013. – Vol.48. – P. 3843–3846.
15. Chen L. Growth of ZnSe nano-needles by pulsed laser deposition and their application in polymer/inorganic hybrid solar cells / L. Chen, J.S. Lai, X.N. Fu, J. Sun, Z. Ying, J. Wu, H. Lu, N. Xu. // Thin Solid Films. – 2013. – Vol. 529. – P. 76–79.
16. Díaz-Reyes J. Structural and optical characterization of wurtzite type ZnS / J. Díaz-Reyes, R. Castillo-Ojeda, R. Sanchez- Espíndola, M. Galvan-Arellano, O. Zaca-Moran // Current Applied Physics. – 2015. – Vol. 15. – P. 103–109.
17. Xu X. Structural and optical studies of ZnS nanocrystalfilms prepared by sulfosalicylic acid (C7H6O6S)-assisted galvanostatic deposition with subsequent annealing / X. Xu, F. Wang, J. Liu, Z. Lia, J. Ji, J. Chen // Thin Solid Films. – 2012. – Vol. 520. – P. 6864–6868.
18. Arbi N. Experimental investigation of the effect of Zn/S molar ratios on the physical and electrochemical properties of ZnS thin films / N. Arbi, I. Ben Assaker, M. Gannouni, A. Kriaa, R. Chtourou // Materials Science in Semiconductor Processing. – 2015. – Vol. 40. – P. 873–878.
19. Kumar S. Development of nanocrystalline ZnSe thin film through electrodeposition from a non-aqueous solution / S. Kumar, M. Nuthalapatia, J. Maity // Scripta Materialia. – 2012. – Vol.67. – P. 396–399.
20. Bu I. Sol–gel synthesis of ZnS(O,OH) thin films: Influence of precursor and process temperature on its optoelectronic properties / I. Bu // Journal of Luminescence. – 2013. – Vol. 134. – P. 423–428.
21. Ehsana M.A. Surface morphological and photoelectrochemical studies of ZnS thin films developed from single source precursors by aerosol assisted chemical vapour deposition / M.A. Ehsana, T.A. Nirmal Peiris, K.G. Upul Wijayantha, H. Khaledi, H. N. Ming, M. Misran, Z. Arifin, M. Mazhar // Thin Solid Films. – 2013. – Vol. 540. – P. 1–9.
22. Ateş A. ZnS thin film and Zn/ZnS/n-Si/Au-Sb sandwich structure grown with SILAR method and defining the characteristic parameters / A. Ateş, B. Güzeldir, M. Sağlam // Materials Science in Semiconductor Processing. – 2011. – Vol. 14, Iss. 1. – P. 28–36.
23. Offor P. O. Chemical spray pyrolysis synthesis of zinc sulphide (ZnS) thin films via double source precursors / P.O. Offor, B.A. Okorie, B.A. Ezekoye, V.A. Ezekoye, J. I. Ezema // Journal of Ovonic Research. – 2015. – Vol. 11, №. 2. – P. 73–77.
24. Liu W. Effect of deposition variables on properties of CBD ZnS thin films prepared in chemical bath of ZnSO4/SC(NH2)2/Na3C3H5O7/NH4OH / W. Liu, C. Yang, S. Hsieh // Applied Surface Science. – 2013. – Vol 264. – P.213–218.
25. Chen L. Comparative study of ZnSe thin films deposited from modified chemical bath solutions with ammonia-containing and ammoniafree precursors / L. Chen, D. Zhang, G. Zhai, J. Zhang // Materials Chemistry and Physics. – 2010. – Vol. 120, Iss. 2–3. – P. 456–460.
26. Agawane G.L. Preparation and characterization of chemical bath deposited nanocrystalline ZnSe thinfilms using Na3-citrate and hydrazine hydrate: A comparative study / G.L. Agawane, S. W. Shin, M.P. Suryawanshi, K.V. Gurav, A.V. Moholkar, J. Y. Lee, P.S. Patil, J. H. Yun, J. H. Kim // Materials Letters. – 2013. – Vol. 106. – P. 186–189.
27. Kassim A. Deposition and characterization of ZnS thin films using chemical bath deposition method in the presence of sodium tartrate as complexing agent / A. Kassim, T. Teea, H. Mina, S. Nagalingamb // Pakistan Journal of Scientific and Industrial Research Series A: Physical Sciences. – 2011. – Vol 54(1). – P. 1–5.
28. Pawar S.M. Recent status of chemical bath deposited metal chalcogenide and metaloxide thin films / S.M. Pawar, B.S. Pawar, J.H. Kim, Oh-Shim Joo, C.D. Lokhande // Curr. Appl. Phys. – 2011. – Vol. 11. – P. 117–161.
29. Марков В.Ф., Маскаева Л.Н., Иванов П.Н. Гидрохимическое осаждение пленок сульфидов металлов: моделирование и експеримент / Екатеринбург: УрО РАН, 2006. – 217 с.
30. Liu Q. Influence of the Ultrasonic VIbration on Chemical Bath Deposition of ZnS thin Films / Q. Liu, G. Mao / Surface Review and Letters. – 2009. – Vol. 16, No. 6. – P. 895–899.
References (International): 1. Andreev A.A. Synthesis and Some Properties of Single Crystals of the ZnxGd1-xS and ZnSySe1-y Solid Solutions, A.A. Andreev, M.F. Bulanyi, S.A. Golikov, L.A. Mozharovsikii, Russian Journal of Inorganic Chemistry, 1995, Vol. 40, P. 1039–1042.
2. Knitter S. Der Chemische Transport von Mischkristallen in den Systemen MnS/ZnS, FeS/ZnS und FeS/MnS, S. Knitter, M. Binnewies, Zeitschrift für anorganische und allgemeine Chemie, 1999, Vol. 625, Iss. 9, P. 1582–1588.
3. Block S. Round-Robin Study of the High Pressure Phase Transition in ZnS, S Block, Acta Crystallographica, Section A, 1978, Vol. 34, S. 316a.
4. Smith P.L. The high-pressure structures of zinc sulphide and zinc selenide, P. L. Smith, J. E. Martin, Physics Letters, 1965, Vol. 19, Iss. 7, P. 541–543.
5. Bither T. A. Transition Metal Pyrite Dichalcogenides. High-Pressure Synthesis and Correlation of Properties, T. A. Bither, R. J. Bouchard, W.H. Cloud, P.C. Donohue, W.J. Siemons, Inorganic Chemistry, 1968, Vol. 7, P. 2208–2220.
6. Parasyuk O.V. Phase diagram of the Cu2GeSe3–ZnSe system and crystal structure of the Cu2ZnGeSe4 compound, O.V. Parasyuk, L.D. Gulay, Y.E. Romanyuk, L.V. Piskach, Journal of Alloys and Compounds, 2001, Vol. 329. P. 202–207.
7. Kulakov M.P. Phase Diagram and Crystallization In The System CdSe-ZnSe, M.P. Kulakov, I.V. Balyakina, N.N. Kolesnikov, Inorganic Materials, 1989, Vol. 25, P. 1386–1389.
8. Kurbatov D. Growth kinetics and stoichiometry of ZnS films obtained by closespaced vacuum sublimation technique, D. Kurbatov, A. Opanasyuk, S. Duvanov, A. Balogh, H. Khlyap, Solid State Sciences, 2011, Vol. 13, P. 1068–1071.
9. Arslana M. Structural and optical properties of copper enriched ZnSe thin films prepared by closed space sublimation technique, M. Arslana, A. Maqsood, A. Mahmoo, A. Iqba, Materials Science in Semiconductor Processing, 2013, Vol. 16, P. 1797–1803.
10. Ivashchenko M.M. Influence of deposition conditions on morphological, structural, optical and electro-physical properties of ZnSe films obtained by close-spaced vacuum sublimation, M.M. Ivashchenko, I.P. Buryk, A.S. Opanasyuk, D. Nam, H. Cheong, Ja.G. Vazievb, V.V. Bibyk, Materials Science in Semiconductor Processing, 2015, Vol. 36, P. 13–19.
11. Emam-Ismail M. Microstructure and optical studies of electron beam evaporated ZnSe1−xTex nanocrystalline thin films, M. Emam-Ismail, M. El-Hagary, E. Shaaban, A. Al-Hedeib., Journal of Alloys and Compounds, 2012, Vol. 532, P. 16–24.
12. Jian S. Berkovich nanoindentation-induced dislocation energetics and pop-ineffects in ZnSe thin films, S. Jian, Y. Lin, Journal of Alloys and Compounds, 2014, Vol. 590, P. 153–156.
13. Lee L. Origin of localized states in zinc-blende ZnCdSe thin films and the influence on carrier relaxation of self-assembled ZnTe/ZnCdSe quantum dots, L. Lee, Y. Dai, C. Yang, W. Fan, W. Chou, Journal of Alloys and Compounds, 2015, Vol. 632, P. 392–396.
14. Zhang W. Phase controlled synthesis and optical properties of ZnS thin films by pulsed laser deposition, W. Zhang, X. Zeng, J. Lu, H. Chen., Materials Research Bulletin, 2013, Vol.48, P. 3843–3846.
15. Chen L. Growth of ZnSe nano-needles by pulsed laser deposition and their application in polymer/inorganic hybrid solar cells, L. Chen, J.S. Lai, X.N. Fu, J. Sun, Z. Ying, J. Wu, H. Lu, N. Xu., Thin Solid Films, 2013, Vol. 529, P. 76–79.
16. Díaz-Reyes J. Structural and optical characterization of wurtzite type ZnS, J. Díaz-Reyes, R. Castillo-Ojeda, R. Sanchez- Espíndola, M. Galvan-Arellano, O. Zaca-Moran, Current Applied Physics, 2015, Vol. 15, P. 103–109.
17. Xu X. Structural and optical studies of ZnS nanocrystalfilms prepared by sulfosalicylic acid (P.7H6O6S)-assisted galvanostatic deposition with subsequent annealing, X. Xu, F. Wang, J. Liu, Z. Lia, J. Ji, J. Chen, Thin Solid Films, 2012, Vol. 520, P. 6864–6868.
18. Arbi N. Experimental investigation of the effect of Zn/S molar ratios on the physical and electrochemical properties of ZnS thin films, N. Arbi, I. Ben Assaker, M. Gannouni, A. Kriaa, R. Chtourou, Materials Science in Semiconductor Processing, 2015, Vol. 40, P. 873–878.
19. Kumar S. Development of nanocrystalline ZnSe thin film through electrodeposition from a non-aqueous solution, S. Kumar, M. Nuthalapatia, J. Maity, Scripta Materialia, 2012, Vol.67, P. 396–399.
20. Bu I. Sol–gel synthesis of ZnS(O,OH) thin films: Influence of precursor and process temperature on its optoelectronic properties, I. Bu, Journal of Luminescence, 2013, Vol. 134, P. 423–428.
21. Ehsana M.A. Surface morphological and photoelectrochemical studies of ZnS thin films developed from single source precursors by aerosol assisted chemical vapour deposition, M.A. Ehsana, T.A. Nirmal Peiris, K.G. Upul Wijayantha, H. Khaledi, H. N. Ming, M. Misran, Z. Arifin, M. Mazhar, Thin Solid Films, 2013, Vol. 540, P. 1–9.
22. Ateş A. ZnS thin film and Zn/ZnS/n-Si/Au-Sb sandwich structure grown with SILAR method and defining the characteristic parameters, A. Ateş, B. Güzeldir, M. Sağlam, Materials Science in Semiconductor Processing, 2011, Vol. 14, Iss. 1, P. 28–36.
23. Offor P. O. Chemical spray pyrolysis synthesis of zinc sulphide (ZnS) thin films via double source precursors, P.O. Offor, B.A. Okorie, B.A. Ezekoye, V.A. Ezekoye, J. I. Ezema, Journal of Ovonic Research, 2015, Vol. 11, №. 2, P. 73–77.
24. Liu W. Effect of deposition variables on properties of CBD ZnS thin films prepared in chemical bath of ZnSO4/SC(NH2)2/Na3C3H5O7/NH4OH, W. Liu, C. Yang, S. Hsieh, Applied Surface Science, 2013, Vol 264, P.213–218.
25. Chen L. Comparative study of ZnSe thin films deposited from modified chemical bath solutions with ammonia-containing and ammoniafree precursors, L. Chen, D. Zhang, G. Zhai, J. Zhang, Materials Chemistry and Physics, 2010, Vol. 120, Iss. 2–3, P. 456–460.
26. Agawane G.L. Preparation and characterization of chemical bath deposited nanocrystalline ZnSe thinfilms using Na3-citrate and hydrazine hydrate: A comparative study, G.L. Agawane, S. W. Shin, M.P. Suryawanshi, K.V. Gurav, A.V. Moholkar, J. Y. Lee, P.S. Patil, J. H. Yun, J. H. Kim, Materials Letters, 2013, Vol. 106, P. 186–189.
27. Kassim A. Deposition and characterization of ZnS thin films using chemical bath deposition method in the presence of sodium tartrate as complexing agent, A. Kassim, T. Teea, H. Mina, S. Nagalingamb, Pakistan Journal of Scientific and Industrial Research Series A: Physical Sciences, 2011, Vol 54(1), P. 1–5.
28. Pawar S.M. Recent status of chemical bath deposited metal chalcogenide and metaloxide thin films, S.M. Pawar, B.S. Pawar, J.H. Kim, Oh-Shim Joo, C.D. Lokhande, Curr. Appl. Phys, 2011, Vol. 11, P. 117–161.
29. Markov V.F., Maskaeva L.N., Ivanov P.N. Hidrokhimicheskoe osazhdenie plenok sulfidov metallov: modelirovanie i eksperiment, Ekaterinburh: UrO RAN, 2006, 217 p.
30. Liu Q. Influence of the Ultrasonic VIbration on Chemical Bath Deposition of ZnS thin Films, Q. Liu, G. Mao, Surface Review and Letters, 2009, Vol. 16, No. 6, P. 895–899.
Content type: Article
Appears in Collections:Chemistry, Technology and Application of Substances. – 2018. – Vol. 1, No. 2

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