https://oldena.lpnu.ua/handle/ntb/42539
Title: | The analysis of technologycal methods for preparation of reflecting grading for devices based on surface acoustic waves |
Authors: | Smerklo, Lubomyr Shkoropad, Vasyl Zubkov, Anatolij Kuchmij, Galyna |
Affiliation: | Lviv Radiotechnical Research Institute Lviv Polytechnic National University |
Bibliographic description (Ukraine): | The analysis of technologycal methods for preparation of reflecting grading for devices based on surface acoustic waves / L. Smerklo, V. Shkoropad, A. Zubkov, G. Kuchmij // Вісник Національного університету "Львівська політехніка". – 2002. – № 458 : Елементи теорії та прилади твердотілої електроніки. – С. 176–179. – Bibliography: 3 titles. |
Journal/Collection: | Елементи теорії та прилади твердотілої електроніки |
Issue Date: | 2002 |
Publisher: | Видавництво Національного університету "Львівська політехніка" |
Country (code): | UA |
Place of the edition/event: | Львів |
Keywords: | reflecting grading surface acoustic wave technology |
Number of pages: | 176–179 |
Abstract: | The formation methods for reflecting grooves with vertical walls and depth of up to 7 are analyzed and optimized at the paper. |
URI: | https://ena.lpnu.ua/handle/ntb/42539 |
Copyright owner: | © Lubomyr Smerklo, Vasyl Shkoropad, Anatolij Zubkov, Galyna Kuchmij, 2002 |
References (Ukraine): | 1. L. Smerklo, V. Shkoropad, G. Kuchmij Filters based on surface acoustic waves for UHF range // Journal of Lviv Polytechnic National University, Radioelectronics and telecommunications, No.387, 2000, pp.-346-354 (in Ukrainian). 2. Filters on surface acoustic waves: Calculations, technology and applications / Edited by Matthews, 1981, 471 p. 3. Z. Hotra, S. Lukojanov, L. Smerklo Laser-stimulated etching in IC technology // Foreign electronic equipment, 1986, No.6, pp. 3-55 (in Russian). |
Content type: | Article |
Appears in Collections: | Елементи теорії та прилади твердотілої електроніки. – 2002. – №458 |
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33_176-179.pdf | 66.86 kB | Adobe PDF | View/Open |
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