https://oldena.lpnu.ua/handle/ntb/42487| Title: | Survey of quality and reliability problems in design of MEMS |
| Authors: | Andonova, Anna Stoynova Atanasova, Natasha Georgieva |
| Affiliation: | Technical University – Sofia, Bulgaria |
| Bibliographic description (Ukraine): | Andonova A. S. Survey of quality and reliability problems in design of MEMS / A. S. Andonova, N. G. Atanasova // Вісник Національного університету "Львівська політехніка". – 2002. – № 458 : Елементи теорії та прилади твердотілої електроніки. – С. 38–43. – Bibliography: 4 titles. |
| Journal/Collection: | Елементи теорії та прилади твердотілої електроніки |
| Issue Date: | 2002 |
| Publisher: | Видавництво Національного університету "Львівська політехніка" |
| Country (code): | UA |
| Place of the edition/event: | Львів |
| Keywords: | MEMS Quality Reliability Failure Modes Fault Simulation |
| Number of pages: | 38–43 |
| Abstract: | The interdisciplinary nature of MicroElectroMechanical Systems (MEMS) utilizes design engineering and manufacturing expertise from a wide and diverse range of technical areas. In order to produce a high reliability and quality MEMS we must not only examine the device itself, but must also examine the entire process surrounding the devices, from conception to finish. This means that the process must be qualified, with the supplier fully investigated, the design verified, and the packaging certified. The paper presents a survey of the various aspects of MEMS, with emphasis on its reliability and quality features in the design phase. |
| URI: | https://ena.lpnu.ua/handle/ntb/42487 |
| Copyright owner: | © Anna Stoynova Andonova, Natasha Georgieva Atanasova, 2002 |
| References (Ukraine): | [1] G. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, New York, NY, 1998. [2] S. Sze, Semiconductor Sensors, Wiley Inter-Science, New York, 1994 [3] D. M. Tanner at all, “Reliability Test of a Surface Micromachined Microengine Using SHiMMeR” Proceedings of SPIE, Vol. 3224, PP 14-23, 1997. [4] W. Kalita, J. Potenski, “Activity of the Rzeszow Centre in the Field of Microelectronics and Packaging-Investigations and Production”, Proceedings of IMAPS, Poland 2001, pp.13-20. |
| Content type: | Article |
| Appears in Collections: | Елементи теорії та прилади твердотілої електроніки. – 2002. – №458 |
| File | Description | Size | Format | |
|---|---|---|---|---|
| 8_38-43.pdf | 86 kB | Adobe PDF | View/Open |
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